SUPREME

SUPREME aims at developing scalable baseline processes for superconducting quantum devices and provide European SMEs, start-ups, academia, RTOs and large enterprises with access to the processes. The project will implement an industrialisation roadmap for the superconducting quantum technologies for applications in quantum computing, sensing and communication (goal is to reach TRL6 and MRL6). SUPREME project will demonstrate a 3D integrated qubit module with 200 qubits will be demonstrated, improving stability, yield, and reproducibility of the key processes for superconducting quantum chips.  

SUPREME aims at licensing its piloting services, preparing for technology transfers to volume manufacturing. Access to the technologies will be given through PDKs and pilot runs that will enable users to design the devices based on SUPREME processes.  

SUPREME Service Office will enable a smooth customer experience.  

The SUPREME project will achieve this through integrated objectives: 

1. Develop repeatable fabrication processes; 

1. Provide access to fabrication services via PDKs/pilot runs (Service Office);  

1. Build European development and innovation ecosystem for superconducting quantum chips.   

Main points (4 scalable baseline processes) 

1. Angle-evaporated Josephson junction process for superconducting qubits. 

1. Etched junction processes (trilayer, overlap) for TWPAs, SFQ, SQUIDs and qubits. 

1. 3D integration processes for superconducting through-silicon vias and flip-chip bonding for multi-chip integration. 

1. Hybrid processes for superconducting nanowire single photon detectors (SNSPDs), and electro-optic transducers. Role of AMIRES 

Role of AMIRES 

AMIRES is responsible for dissemination, communication, clustering and skill development activities 

Project partners 

• Coordinator:
  • INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW (IMEC), Belgium

• Partners:
  1. AMIRES S.R.O (ABIMI), Czech Republic
  2. ARQUE SYSTEMS GMBH (ARQUE), Germany
  3. COMMISSARIAT À L’ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES (CEA), France
  4. C12 QUANTUM ELECTRONICS (C12), France
  5. CONSEJO SUPERIOR DE INVESTIGACIONES CIENTÍFICAS (CSIC), Spain
  6. FRAUNHOFER-GESELLSCHAFT (Fraunhofer), Germany
  7. FORSCHUNGSZENTRUM JÜLICH GMBH (FZJ), Germany
  8. GROOVE QUANTUM B.V. (Groove), The Netherlands
  9. IHP GMBH – LEIBNIZ INSTITUTE FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK (IHP), Germany
  10. INFINEON TECHNOLOGIES DRESDEN AG & CO. KG (IFD), Germany
  11. INTERNATIONAL IBERIAN NANOTECHNOLOGY LABORATORY (INL), Portugal
  12. JYVÄSKYLÄN YLIOPISTO (JYU), Finland
  13. QUANTUM MOTION TECHNOLOGIES LIMITED (QM), Spain
  14. QUBLY (Quobly), France
  15. SEMIQON TECHNOLOGIES OY (SemiQon), Finland
  16. SILTRONIC AG (Siltronic), Germany
  17. NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK (TNO), The Netherlands
  18. TECHNISCHE UNIVERSITEIT DELFT (TUDelft), The Netherlands
  19. THE NATIONAL QUANTUM SCIENCE AND TECHNOLOGY INSTITUTE (NQSTI), Italy
  20. THE PORTUGUESE QUANTUM INSTITUTE (PQI), Portugal
  21. UNIVERSITÄT REGENSBURG (UR), Germany
  22. TEKNOLOGIAN TUTKIMUSKESKUS VTT OY (VTT), Finland

SUPREME is co-funded by the Chips Joint Undertaking, under grant agreement No 101286304, and the National Funding Authorities of the Participating States: Austria, Czechia, Finland, France, Germany, Italy, the Netherlands, and Spain.